Tetrakis(trifluorophosphine) nickel/Ni(PF3)4

Product Code GC-012
CAS Number 13859-65-9
Assay (purity) 99%
Purity Method by GC
Molecular Weight 410.62 g/mol
Form Liquid
Appearance colorless heavy liquid
Sensitivity
Melting Point 55 °C
Molecular Formula F12NiP4
Linear Formula

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Safety Information

Signal Word Danger
Pictograms

Hazard Statements H314, H317, H334
Precautionary Statements P233, P260, P264, P271, P272, P280, P284, P301+P330+P331, P302 + P361 + P354, P304 + P340, P305 + P354 + P338, P316, P333 + P317, P342 + P316, P362 + P364, P363, P403, P405, P501
UN 1760
Transport Description Corrosive Liquid, Toxic, N.O.S. (Tetrakis(trifluorophosphine)nickel)
Hazardous Class 8
Packing Group II
In TSCA Registry No

Certificates of Analysis (CoA)

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External Identifiers

Pubchem CID
SMILES FP(F)F.FP(F)F.FP(F)F.FP(F)F.[Ni]
IUPAC Name nickel;trifluorophosphane
InchI Identifier InChI=1S/4F3P.Ni/c4*1-4(2)3
InchI Key TXBNRHVYQQTHJK-UHFFFAOYSA-N

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Applications in CVD

In the CVD process, Ni(PF₃)₄ acts as a precursor, being volatilized and decomposed on a substrate to form thin, uniform nickel films. This method is valued for its precision in film thickness, making it essential for applications in semiconductor devices and electronic components.

Research and Niche Uses

Beyond CVD, Ni(PF₃)₄ is used in research to investigate the structural and electronic properties of nickel complexes. It may also find niche applications in catalysis and the synthesis of other compounds, though specific uses are not widely documented.

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